Chromatic and spherical aberration correction for silicon aplanatic solid immersion lens for fault isolation and photon emission microscopy of integrated circuits
Goldberg, B B, A Yurt, Y. Lu, E Ramsay, F.H. Koklu, J. Mertz, T G Bifano, and M.S. Unlu. 2011. “Chromatic and Spherical Aberration Correction for Silicon Aplanatic Solid Immersion Lens for Fault Isolation and Photon Emission Microscopy of Integrated Circuits”. Microelectronics Reliability 51: 1637-39.