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High NA Solid Immersion Microscopy with Adaptive Optics

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Aplanatic solid immersion lens (SIL) microscopy is required to achieve the highest possible resolution for next generation silicon IC backside inspection and failure analysis. However, aplanatic SILs are susceptible to spherical aberration introduced by substrate thickness mismatch. We have...

Harvard Business School Mini-MBA Class 2014

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Adaptive optics wavefront compensation for solid immersion microscopy in backside imaging

Publication: Miscellaneous

Lu, Yang. 2014. “Adaptive Optics Wavefront Compensation for Solid Immersion Microscopy in Backside Imaging.”

Yang Lu

Backside FA with SILs: Integrated Circuit Super-Resolution Failure Analysis with Solid Immersion Lenses

Publication: Journal Article

Vigil, Kyle, Yang Lu, Abdulkadir Yurt, Tenzile Berkin Cilingiroglu, Thomas G Bifano, Selim Unlu, and Bennett B Goldberg. 2014. “Backside FA With SILs: Integrated Circuit Super-Resolution Failure Analysis With Solid Immersion Lenses.”

Spherical Aberration Correction in Aplanatic Solid Immersion Imaging with Adaptive Optics

Publication: Conference Paper

Lu, Yang, Euan Ramsay, Christopher Stockbridge, Selim M Unlu, Thomas Bifano, Bennett Goldberg, and . 2012. “Spherical Aberration Correction in Aplanatic Solid Immersion Imaging With Adaptive Optics”. In Frontiers in Optics, FTu3A-25. Optical Society of America.

Critical considerations of pupil alignment to achieve open-loop control of MEMS deformable mirror in nonlinear laser scanning fluorescence microscopy

Publication: Conference Paper

Sun, Wei, Yang Lu, Jason B Stewart, Thomas G Bifano, and Charles P Lin. 2012. “Critical Considerations of Pupil Alignment to Achieve Open-Loop Control of MEMS Deformable Mirror in Nonlinear Laser Scanning Fluorescence Microscopy”. In SPIE MOEMS-MEMS, 82530H-82530H. International Society for Optics and Photonics.

Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror

Publication: Journal Article

Lu, Y., E Ramsay, C R Stockbridge, A Yurt, F.H. Koklu, T G Bifano, M.S. Unlu, and B B Goldberg. 2012. “Spherical Aberration Correction in Aplanatic Solid Immersion Lens Imaging Using a MEMS Deformable Mirror”. Microelectronics Reliability 52: 2120-22.

Deformable mirror control

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a). Deformable mirror open loop control: I characterize the errors associated with open-loop control of a MEMS deformable mirror using an approach that combines sparse calibration of the electrostatic actuator state space with an elastic plate model of the mirror facesheet. The sources of...

Solid immersion microscopy system with deformable mirror for correction of aberrations

Publication: Miscellaneous

Goldberg, Bennett, Thomas Bifano, Selim Unlu, Euan Ramsay, Hakan Koklu, Jerome Mertz, Yang Lu, Abdulkadir Yurt, and Christopher Stockbridge. 2014. “Solid Immersion Microscopy System With Deformable Mirror for Correction of Aberrations.”