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Backside FA with SILs: Integrated Circuit Super-Resolution Failure Analysis with Solid Immersion Lenses

Publication: Journal Article

Vigil, Kyle, Yang Lu, Abdulkadir Yurt, Tenzile Berkin Cilingiroglu, Thomas G Bifano, Selim Unlu, and Bennett B Goldberg. 2014. “Backside FA With SILs: Integrated Circuit Super-Resolution Failure Analysis With Solid Immersion Lenses.”

Spherical Aberration Correction in Aplanatic Solid Immersion Imaging with Adaptive Optics

Publication: Conference Paper

Lu, Yang, Euan Ramsay, Christopher Stockbridge, Selim M Unlu, Thomas Bifano, Bennett Goldberg, and . 2012. “Spherical Aberration Correction in Aplanatic Solid Immersion Imaging With Adaptive Optics”. In Frontiers in Optics, FTu3A-25. Optical Society of America.

Critical considerations of pupil alignment to achieve open-loop control of MEMS deformable mirror in nonlinear laser scanning fluorescence microscopy

Publication: Conference Paper

Sun, Wei, Yang Lu, Jason B Stewart, Thomas G Bifano, and Charles P Lin. 2012. “Critical Considerations of Pupil Alignment to Achieve Open-Loop Control of MEMS Deformable Mirror in Nonlinear Laser Scanning Fluorescence Microscopy”. In SPIE MOEMS-MEMS, 82530H-82530H. International Society for Optics and Photonics.

Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror

Publication: Journal Article

Lu, Y., E Ramsay, C R Stockbridge, A Yurt, F.H. Koklu, T G Bifano, M.S. Unlu, and B B Goldberg. 2012. “Spherical Aberration Correction in Aplanatic Solid Immersion Lens Imaging Using a MEMS Deformable Mirror”. Microelectronics Reliability 52: 2120-22.

Deformable mirror control

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a). Deformable mirror open loop control: I characterize the errors associated with open-loop control of a MEMS deformable mirror using an approach that combines sparse calibration of the electrostatic actuator state space with an elastic plate model of the mirror facesheet. The sources of...

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Backside FA with SILs: Integrated Circuit Super-Resolution Failure Analysis with Solid Immersion Lenses

Spherical Aberration Correction in Aplanatic Solid Immersion Imaging with Adaptive Optics

Critical considerations of pupil alignment to achieve open-loop control of MEMS deformable mirror in nonlinear laser scanning fluorescence microscopy

Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror

Deformable mirror control

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